Parker PFA閥 Parker PFA Valves UHP Fluoropolymer ultra clean valves
Ultra High Purity Fluoropolymer PFA Valves - 22 Series

UHP 含氟聚合物超潔凈閥門由 PFA 和 PTFE 制成，適用于半導體液體應用，包括高濃度酸和堿、透明化學品和漿料。這些新型、超潔凈、含氟聚合物、手動和氣動閥可提供更大的流量并提供更好的閥座密封，從而增強無泄漏性能，從而提高安全性。它們旨在以可用的最小包裝提供最高流量。計算流體動力學軟件被用來最大化通過這些閥門的流量。這些超潔凈閥門適用于半導體液體應用，包括高濃度酸和堿、透明化學品和漿液。其他要求嚴苛的市場可以使用這些閥門，因為它們具有清潔度和承載高腐蝕性化學品的能力。

UHP Fluoropolymer ultra clean valves are made from PFA and PTFE for semiconductor liquid applications including high concentration acids and bases, clear chemistries and slurries. These new, ultra clean, fluoropolymer, manual and pneumatic valves offer increased flow and provide better seat sealing for enhanced, leak-free performance for greater safety. They are designed to deliver the highest flow in the smallest package available. Computational fluid dynamics software was utilized to maximize the flow through these valves. These ultra clean valves are for semiconductor liquid applications including high concentration acids and bases, clear chemistries and slurries. Other demanding markets can use these valves for their cleanliness and ability to carry highly corrosive chemicals.

22 Series PFA Valves Quarter Inch

22 Series PFA Valves Half Inch

1" and 1-1/4" 22 Series Valves Ultra High Purity 22 Series Valves UHP Fluoropolymer Valves

市場：
- 半導體加工
- 化學加工
- 分析設備
- 實驗室

功能/優點：
- 在酸和漿液中的循環壽命長
- 占地面積小，采用真正的鎖定、掛牌設計 (LOTO)
- 雙點密封提供雙倍密封能力（正在申請專利）
- 光滑的孔和完全掃過的路徑，最大限度地減少顆粒截留面積并防止停滯
- 100% 泄漏測試
- 符合 SEMI-F57-0301 標準

主要應用：
- 化學機械拋光 (CMP) 漿料
- 超高純度工藝
- 用于半導體工藝的透明化學品 - 攪拌
系統
- 清潔系統

Markets:
- Semiconductor processing
- Chemical Processing
- Analytical Equipment
- Laboratory

Features/Benefits:
- High cycle life in acids and slurry
- Compact footprint with a true lock-out, tag-out design (LOTO)
- Dual point seal provides double the sealing power (patent pending)
- Smooth bore and fully swept path, minimizes particle entrapment areas and prevents stagnation
- 100% leak tested
- Meets SEMI-F57-0301 Standards

Key Applications:
- Chemical Mechanical Polishing (CMP) Slurries
- Ultra high purity processes
- Clear chemistries for semiconductor processes
- Blender systems
- Cleaning systems

Technical Specifications

Ultra High Purity Fluoropolymer (PFA) Valves - 22 Series 型號

相關文件
文獻和參考資料
22 系列 PFA 閥門半英寸
22系列PFA閥門一英寸

1/2" and 1-3/4" 22 Series Valves Ultra High Purity 22 Series Valves UHP Fluoropolymer Valves
1/4" and 1-3/8" 22 Series Valves Ultra High Purity 22 Series Valves UHP Fluoropolymer Valves
1" and 1-1/4" 22 Series Valves Ultra High Purity 22 Series Valves UHP Fluoropolymer Valves