Parker 316L Stainless Steel Metal Gasket Face Seal Fittings
Parker Fittings接頭 Tube Fittings
UHP金屬面密封接頭 - UHP Metal Face Seal Fittings

派克316L不銹鋼金屬墊片面密封配件專為超高純度半導(dǎo)體應(yīng)用而設(shè)計(jì)。組裝后，環(huán)形面在真空或正壓條件下形成密封的金屬對(duì)金屬連接。派克Veriflo的SEMI F20材料等級(jí)的UHP金屬端面密封配件，壓蓋，蓋帽和螺母可提供經(jīng)濟(jì)高效的解決方案，并確保派克的質(zhì)量，可靠性和性能。 派克金屬密封件專為要求超高純度條件的關(guān)鍵應(yīng)用而設(shè)計(jì)。配合墊圈和環(huán)形設(shè)計(jì)提供了高完整性的金屬對(duì)金屬密封，可實(shí)現(xiàn)從真空到正壓的可靠服務(wù)。標(biāo)準(zhǔn)的金屬表面密封件的內(nèi)表面平均粗糙度為10英寸。（0.25mm）Ra。PE精加工配件的內(nèi)部表面平均粗糙度為5英寸。（0.13m）Ra和UHP潤(rùn)濕的表面狀況。 Parker使用獲得專利的TorqTite墊圈，該墊圈最初與內(nèi)錐接觸，從而徑向壓出任何夾帶的污染物，并且平滑過渡到內(nèi)徑中可以最大程度地減少截留面積。 UHP金屬面密封件生產(chǎn)線使Parker能夠以有競(jìng)爭(zhēng)力的價(jià)格在晶圓廠應(yīng)用中競(jìng)爭(zhēng)，并補(bǔ)充了Parker當(dāng)前的VacuSeal和Mini buttweld生產(chǎn)線，后者的堅(jiān)固設(shè)計(jì)最適合半導(dǎo)體工具的關(guān)鍵應(yīng)用。

Parker 316L Stainless Steel Metal Gasket Face Seal Fittings
UHP Metal Face Seal Fittings

Parker 316L Stainless Steel Metal Gasket Face Seal Fittings are made for use in ultra high purity semiconductor applications. When assembled, the toroid face forms a leak-tight metal-to-metal connection in vacuum or positive pressure conditions .Parker Veriflo's SEMI F20 material grade UHP Metal Face Seal Fittings, Glands, Caps & Nuts provide cost effective solutions and guarantee Parker's quality, reliability and performance. Parker Metal Face Seal Fittings are designed for critical applications where ultrahigh purity conditions are required. The mating gasket and toroid design provide a high integrity metal-to-metal seal for reliable service from vacuum to positive pressure. Standard finish metal face seal fittings have an internal surface roughness average of 10 ?in. (0.25?m) Ra. PE finished fittings have an internal surface roughness average of 5 ?in. (0.13?m) Ra and UHP wetted surface condition. Parker uses a Patented TorqTite? gasket that initially contacts on the inner taper, radially forcing out any entrapped contaminants, and a smooth transition into the Internal Diameter minimizes entrapment areas. The UHP Metal Face Seal Fittings line allows Parker to compete in fab applications at a competitive price point and complements Parker's current VacuSeal and Mini buttweld lines whose robust design works best for critical applications at the semiconductor tool.

市場(chǎng)：
- 半導(dǎo)體制造Semiconductor Fabrication

特征/優(yōu)點(diǎn)：
- 緊湊的設(shè)計(jì)允許系統(tǒng)小型化和緊密耦合的間距
- 通過在每個(gè)接液部件上永久標(biāo)記的熱代碼，可追溯材料
- 永久性的產(chǎn)品名稱（如果適用）標(biāo)識(shí)制造商，材料和內(nèi)部表面處理
- 增強(qiáng)的母螺母鍍銀促進(jìn)一致的易于組裝
- 受控的潤(rùn)濕表面通過防止脫氣和抑制腐蝕來滿足嚴(yán)格的超高純系統(tǒng)要求
- 專利的Torqtite?墊圈促進(jìn)密封損壞的環(huán)形幾乎消除了由于振動(dòng)或熱循環(huán)而引起的組件松動(dòng)的

應(yīng)用：
- 工具連接
- 閥箱
- 氣柜

Markets:
- Semiconductor Fabrication

Features/Benefits:
- Compact Design allows for system miniaturization and close coupled spacing
- Material traceability via permanently marked heat codes on each wetted component
- Permanent product designation identifies manufacturer, material and internal finish when applicable
- Enhanced female nut silver plating promotes consistent easy assembly
- Controlled wetted surfaces meet stringent ultra high purity system requirements by preventing outgassing and inhibiting corrosion
- Patented Torqtite? gasket promotes sealing of damaged toroids and virtually eliminates assembly loosening due to vibration or thermo-cycling

Applications:
- Tool Hook-Up
- Valve Manifold Boxes
- Gas Cabinets

Technical Specifications

UHP Metal Face Seal Fittings 型號(hào)